METROLOGY / TEST: The emerging role for data mining
نویسندگان
چکیده
The complexity of semiconductor manufacturing and its wealth of data provide an ideal environment for the application of data mining to discover patterns of behavior leading to knowledge. The demands are, however, such that data-mining technology needs to be extended further to achieve its full potential. Companies successful in developing and harnessing this technology will be rewarded with powerful new capabilities for diagnosing process control, yield, and equipment problems.
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